METROLOGIE beamline is a specifically designed tests facility for X-ray optics and Instrumentation R&D, characterization of optical components and detectors, test of new optical schemes and set-ups.

The beamline is composed by two branches which can be operated simultaneously: a soft X-ray branch [30 eV – 1800 eV] and a hard X-ray branch [100 eV – 40 keV, with access to the white beam]. Both branches use a two-axes UHV goniometer as experimental station. On the hard X-ray branch, this equipment is completed by an optical table (including adaptable positioning stages) for accomodating complex optical set-ups.

Beamline Energy Resolution
1.4 * 1010 [meV] @ 12 [eV]
Beamline Resolving Power
7 * 1010 [deltaE/E] @ 12 [eV]
Beamline Energy Range
0.03 - 40 [keV]
Max Flux On Sample
2 * 1010 [ph/s] @ 12 [eV]
1 * 1010 [ph/s] @ 1 [eV]
Spot Size On Sample Hor
100 - 50000 [um]
Spot Size On Sample Vert
100 - 6000 [um]
Techniques
Diffraction
  • Surface diffraction
Emission or Reflection
  • Reflectrometry
Lithography
  • X-ray lithography
Disciplines
Physics
  • Hard condensed matter - electronic properties
  • Quantum electronics & optics
  • Surfaces, interfaces and thin films
control/Data analysis
Control Software Type
  • LabView, Python
Data Output Type
  • Spectra and Images
Data Output Format
  • ascii, NEXUS
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